Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

Autor:	Kiyoshi Takamasu, Satoru Takahashi, Hirokazu Matsumoto, Wiroj Sudatham
Rok vydání:	2015
Předmět:	Engineering Optical fiber business.industry System of measurement General Engineering Physics::Optics Coordinate-measuring machine law.invention Interferometry Length measurement Optics law Ball (bearing) Measurement uncertainty business Fabry–Pérot interferometer
Zdroj:	Precision Engineering. 41:63-67
ISSN:	0141-6359
DOI:	10.1016/j.precisioneng.2015.01.007
Popis:	An optical-comb pulsed interferometer was developed for the positioning measurements of the industrial coordinate measuring machine (CMM); a rough metal ball was used as the target of the single-mode optical fiber interferometer. The measurement system is connected through a single-mode fiber more than 100 m long. It is used to connect a laser source from the 10th floor of a building to the proposed measuring system inside a CMM room in the basement of the building. The repetition frequency of a general optical comb is transferred to 1 GHz by an optical fiber-type Fabry–Perot etalon. Then, a compact absolute position-measuring system is realized for practical non-contact use with a high accuracy of measurement. The measurement uncertainty is approximately 0.6 μm with a confidence level of 95%.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b09bb4db3f68ce9db1cd1916de3d2573 https://doi.org/10.1016/j.precisioneng.2015.01.007 Zobrazit plný text záznamu Full Text from ScienceDirect