| Autor: |
E. Marigo, Eyglis Ledesma, Nuria Barniol, Arantxa Uranga, Francesc Torres, Ivan Zamora, Vassil Tzanov, Mohan Soundara-Pandian |
| Rok vydání: |
2019 |
| Předmět: |
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| Zdroj: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| DOI: |
10.1109/transducers.2019.8808260 |
| Popis: |
A novel AlN PMUT compatible with CMOS-MEMS process is presented. The design is a squared membrane with 4 different sections. The operational frequency of the device in liquid is in the 10 MHz range. Our FEM model shows that the cross-slit increases the displacement as well as the acoustic pressure outputs by a factor of 10. The resulted 4 PMUT sections are sealed by a passive Si 3 N 4 layer allowing reliable liquid operation as demonstrated by the experimental acoustic characterization. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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