Measurement of low-order aberrations with an autostigmatic microscope
| Autor: | William P. Kuhn |
|---|---|
| Rok vydání: | 2017 |
| Předmět: | |
| Zdroj: | Optical System Alignment, Tolerancing, and Verification XI. |
| DOI: | 10.1117/12.2274813 |
| Popis: | The addition of a piezo-electric focusing stage and phase retrieval algorithms to a compact, adaptable autostigmatic microscope provides for both improved focus sensitivity during optical system alignment as well as the ability to measure low-order aberrations for system qualification. A description of the instrument and initial results are reported. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|