Dynamic Characteristics of the Micro-Fluidic Systems Actuated by Thermopneumatic-Method

Autor:	Yong-Sang Kim, Min-Chul Moon, C.J. Kang, Jong-Chul Yoo, Dongryul Jeon
Rok vydání:	2006
Předmět:	Materials science Fabrication Physics and Astronomy (miscellaneous) business.industry Microfluidics General Engineering General Physics and Astronomy Micropump Substrate (electronics) Volumetric flow rate Power (physics) Duty cycle Optoelectronics business Voltage
Zdroj:	Japanese Journal of Applied Physics. 45:519-522
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.45.519
Popis:	We investigated the dynamic characteristics of microfluidic systems under various operating conditions for micropump and microvalve. The pumping rates of the micropump are dependent on a frequency, a duty ratio of applied voltage, a poly(dimethylsiloxane) (PDMS) membrane thickness, and a channel depth. The maximum pumping rate of 64 nl/min was obtained at the applied frequency of 5 Hz and duty ratio of 4% for a PDMS membrane thickness of 450 µm and a channel depth of 100 µm. The flow rates of the microvalve with a 300 µm PDMS membrane thickness are measured as a function of an applied power. The flow rate is easily controlled by the on/off alternation with the applied power of 400 mW. The in-channel structured PDMS micropump and microvalve are fabricated with the same fabrication procedure on the same substrate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b07a1bb40464ed513503720eeeb08c19 https://doi.org/10.1143/jjap.45.519 Zobrazit plný text záznamu