Micro-cantilever shocking-acceleration switches with threshold adjusting and ‘on’-state latching functions
| Autor: | Xinxin Li, Yuelin Wang, Heng Yang, Minhang Bao, Mengjun Jia, Zhaohui Song |
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| Rok vydání: | 2007 |
| Předmět: |
Engineering
Frequency response Bulk micromachining Cantilever business.industry Mechanical Engineering Bandwidth (signal processing) Electrical engineering Accelerometer Electronic Optical and Magnetic Materials law.invention Step response Mechanics of Materials law Control theory Hammer Electrical and Electronic Engineering business Inertial switch |
| Zdroj: | Journal of Micromechanics and Microengineering. 17:567-575 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/17/3/020 |
| Popis: | A micromechanical shocking-acceleration switch is developed. By using electrostatic force combined with the dynamic shocking force, the switch features a threshold adjustable capability. Besides, an electrostatic pull-in phenomenon is used to enable the switch an 'on'-state latching ability. The former facilitates individual applications and can compensate for the threshold inaccuracy from fabrication tolerance. The latter can keep the switch at the 'on'-state even after the shock disappears. Theoretical analysis is carried out for the step shocking response, with the response frequency bandwidth taken into consideration. Then the switch of the 1000?5000 g measure range is designed, simulated with Coventor-ware and micro-fabricated using bulk micromachining technologies. Both the threshold adjusting and the 'on'-state latching functions of the micromechanical shock switch are verified by using a dropping hammer experiment. The tested data generally have an agreement with the simulated results. Even so, the slight difference between the simulation and the tested results is discussed. |
| Databáze: | OpenAIRE |
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