Effects of Propane/Nitrogen Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films
| Autor: | Shao-En Chiou, Sham-Tsong Shiue, Liang-Hsun Lai, Hsiang-Chun Hsueh |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Materials science
Thermal chemical vapor deposition Hybrid physical-chemical vapor deposition Inorganic chemistry chemistry.chemical_element Combustion chemical vapor deposition Microstructure Nitrogen Electronic Optical and Magnetic Materials chemistry.chemical_compound Carbon film chemistry Propane Deposition (phase transition) |
| Zdroj: | ECS Journal of Solid State Science and Technology. 2:M44-M51 |
| ISSN: | 2162-8777 2162-8769 |
| DOI: | 10.1149/2.037311jss |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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