Introducing gallium in silicon and thin film polysilicon using self assembled monolayer doping

Autor:	Carolyn Spaulding, Alex Taylor, Scott Williams, Glenn Packard, Gabriel Curvacho, Santosh Kurinec
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Letters. 325:132839
ISSN:	0167-577X
DOI:	10.1016/j.matlet.2022.132839
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b0365a22a744699c5ba24e21ba2b8b11 https://doi.org/10.1016/j.matlet.2022.132839 Zobrazit plný text záznamu Full Text from ScienceDirect