Microstructure of the coating obtained by magnetron sputtering of a Ni-Cr-B4C composite target
| Autor: | S V Zaitsev, D S Prokhorenkov, M S Ageeva, A A Skiba |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | Journal of Physics: Conference Series. 2124:012021 |
| ISSN: | 1742-6596 1742-6588 |
| Popis: | This paper presents data on obtaining a composite coating by radio frequency (RF) magnetron sputtering of a Ni-Cr-B4C composite target in an inert gas (argon) environment. To make the target, Ni-Cr-B4C composite powder was applied to the copper base of the target by detonation gas-thermal spraying. The obtained targets served as a source of coating material during high-frequency magnetron sputtering. This method of coating production ensures the reproducibility of their properties, as well as the uniformity of coating thickness and good adhesion to various target backings. The data of the study of the structure and morphology of the composite coating are presented. The resulting composite coating Ni-B/Cr7C3 with a thickness of 2 microns has a dense homogeneous structure with expressed textured polycrystallinity. The surface of the resulting coating is represented by nanoscale and homogeneous grains. There is no columnar crystal growth in the coating, which has a positive effect, as the columnar structure reduces the mechanical characteristics of the coatings due to faster oxygen diffusion along the grain boundaries. It is established that the combined use of the Ni-B and Cr7C3 binary phases in composite coatings leads to an increase in operational properties. |
| Databáze: | OpenAIRE |
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