A 64M CMOS Image Sensor using 0.7um pixel with high FWC and switchable conversion gain
| Autor: | Chun Yung Ai, Vincent Venezia, Grant Lindsay, Woonil Choi, Wu-Zang Yang, Zhiqiang Lin, Yibo Zhu, Geunsook Park, Sangjoo Lee, Alan Chih-Wei Hsiung, Y. Jay Jung, King W. Yeung |
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| Rok vydání: | 2020 |
| Předmět: |
Physics
Pixel business.industry 010401 analytical chemistry 020206 networking & telecommunications 02 engineering and technology 01 natural sciences Dot pitch 0104 chemical sciences 0202 electrical engineering electronic engineering information engineering Conversion gain Optoelectronics Quantum efficiency Image sensor business Scaling Degradation (telecommunications) Dark current |
| Zdroj: | 2020 IEEE International Electron Devices Meeting (IEDM). |
| DOI: | 10.1109/iedm13553.2020.9371889 |
| Popis: | This paper presents a 64 mega-pixel, backside-illuminated, CMOS image sensor using a 0.7um pixel pitch with a 7.0ke- linear full well capacity (FWC). A switchable conversion gain design was also demonstrated to have a high 18.0ke- FWC in 4-Cell pixel binning mode. Several new processes were implemented to overcome pixel performance degradation due to pixel scaling. As a result, this high FWC image sensor achieves low dark noise of 1.26e- and high quantum efficiency, comparable to larger pixel pitch products, such as 0.8um. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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