Monolithic double rectangular spiral thin-film inductors implemented with NiFe magnetic cores for on-chip dc–dc converter applications
| Autor: | Jong Dae Kim, Jin Gun Koo, Yong Hyun Lee, Bo Woo Kim, Hoon Soo Park, Jin Yeong Kang, Tae Moon Rho, Sang Gi Kim |
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| Rok vydání: | 2009 |
| Předmět: |
Materials science
business.industry Metals and Alloys Surfaces and Interfaces Converters Inductor Surfaces Coatings and Films Electronic Optical and Magnetic Materials Inductance CMOS Magnetic core Chemical-mechanical planarization Materials Chemistry Optoelectronics business Electrical efficiency Voltage |
| Zdroj: | Thin Solid Films. 517:4204-4206 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2009.02.019 |
| Popis: | This paper describes a simple, on-chip complimentary metal oxide semiconductor (CMOS) compatible thin-film inductor applied for the dc–dc converters. The double rectangular spiral types of the thin-film inductors were implemented with 15 µm-thick copper films upon 2.5 µm thick of the NiFe magnetic core. Prior to fabricating a high-voltage CMOS dc–dc converter circuit, the NiFe magnetic core was deposited on the polyimide film. Adapting a double-rectangular structure, the fabricated monolithic inductor exhibited not only high inductance of 1.6 µH but also high quality factor of 11.2 at 5 MHz. To simplify the integration process, the planarization process for the top magnetic core was eliminated. The performance of the dc–dc converter which combined with our proposed inductors was evaluated at a high power efficiency of 81% when the converter operated at a frequency of 5 MHz corresponding to input and output voltages of 3.3 V and 8.1 V, respectively. |
| Databáze: | OpenAIRE |
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