High-quality transparent conductive indium oxide film deposition by reactive pulsed magnetron sputtering: Determining the limits of substrate heating

Autor:	Shuai Guo, Wahyu Diyatmika, Yeliz Unutulmazsoy, Lei Yang, Bing Dai, Liangge Xu, Jiecai Han, Victor Ralchenko, André Anders, Jiaqi Zhu
Rok vydání:	2022
Předmět:	General Physics and Astronomy Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Applied Surface Science. 585:152604
ISSN:	0169-4332
DOI:	10.1016/j.apsusc.2022.152604
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aff6d3a738263e8092887b4e68de79fe https://doi.org/10.1016/j.apsusc.2022.152604 Zobrazit plný text záznamu Full Text from ScienceDirect