Monochromatization of radiation for spectral control of plasma technological processes

Autor:	A. A. Labuda, A. P. Burmakov, N. N. Nikiforenko
Rok vydání:	1998
Předmět:	Materials science business.industry Plasma Radiation engineering.material Condensed Matter Physics Optics Coating Etching (microfabrication) Plasma technology Light filter engineering Optical radiation business Spectroscopy
Zdroj:	Journal of Applied Spectroscopy. 65:611-613
ISSN:	1573-8647 0021-9037
Popis:	We considered the problem of and developed techniques for creating means of monochromatization of optical radiation with optimal technical-economic parameters for implementing spectral means of controlling various vacuum-plasma technological processes of applying and etching film coatings.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aff649067ddf251780cbc97aa2d966f9 https://doi.org/10.1007/bf02675656 Zobrazit plný text záznamu Full text from SpringerLink