SU-8 ridge-waveguide with holographic grating embedded in nanoimprinted groove
| Autor: | Tahito Aida, Shusuke Asahi, Hiroya Matsukawa, Takao Tokuhara, Hiroshi Kumagai |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Distributed feedback laser
Materials science Fabrication Holographic grating business.industry Grating Condensed Matter Physics Laser Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Optics law Slab Optoelectronics Electrical and Electronic Engineering business Waveguide Groove (music) |
| Zdroj: | Microelectronic Engineering. 98:258-261 |
| ISSN: | 0167-9317 |
| Popis: | Fabrication of SU-8 slab- and ridge-waveguides with holographic grating for DFB laser, effectively utilizing nanoimprint technology (NIL), is presented. Rhodamine-6G-doped SU-8 slab- and ridge-waveguides were embedded in grooves defined by NIL in UV curable resin. Utilization of NIL made it easier to form such a three-dimensional micro structure consisting of ridge stripe and fine corrugation grating. TE-polarized 587nm laser and TE-polarized 594nm light emissions were observed from the slab- and ridge-waveguides, respectively, when the waveguides were irradiated by 532nm pulsed Nd:YAG laser. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect