Reactive evaporation of BaF2 in water vapour for in situ growth of YBa2Cu3Ox thin films

Autor:	R. W. Cline, Yuan Gao, T. Tiedje
Rok vydání:	1991
Předmět:	chemistry.chemical_classification Physics chemistry Oxidizing agent Analytical chemistry Evaporation General Physics and Astronomy Deposition (phase transition) Crystal growth Partial pressure Thin film Inorganic compound Water vapor
Zdroj:	Canadian Journal of Physics. 69:131-136
ISSN:	1208-6045 0008-4204
DOI:	10.1139/p91-019
Popis:	The conversion of BaF2 thin films to BaO during deposition in an oxidizing ambient was investigated as a first step towards the in situ growth of superconducting thin films of YBa2Cu3Ox from Y, Cu, and BaF2 source materials. This conversion was found to occur at a temperature of 800 °C when BaF2 was evaporated in a partial pressure of H2O. The observed conversion temperature agrees well with an equilibrium thermodynamic model. Methods to reduce the growth temperature to the 600– 700 °C range are proposed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::afbbbff0ffbe11a93a7b090052fb2d7d https://doi.org/10.1139/p91-019 Zobrazit plný text záznamu