Nonlinear Micro-Processing of Silicon by Ultrafast Fiber Laser at 1552 nm

Autor:	Yoshiro Ito, Kozo Tada, Rie Tanabe
Rok vydání:	2011
Předmět:	Distributed feedback laser Materials science business.industry Hybrid silicon laser Laser law.invention law Fiber laser Ultrafast laser spectroscopy Optoelectronics Microelectronics Photonics business Ultrashort pulse
Zdroj:	MRS Proceedings. 1365
ISSN:	1946-4274 0272-9172
DOI:	10.1557/opl.2011.1384
Popis:	Processing of transparent materials by non-linear absorption mechanisms induced by short pulse lasers has been applied in many fields. Silicon (Si) is widely used materials in microelectronics, MEMS and photonics. It is, however, not transparent for commonly used processing lasers in near infrared to ultraviolet spectral range and has not been a subject for the non-linear processing by lasers so far. In this paper, possibilities and capabilities of non-linear processing of Si by 900 fs, 1552nm laser radiation are described with special emphasis on application to frequency adjustment of a crystal oscillator in a package made from Si.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::afb39dd0f13a7b1e6f1156a656204584 https://doi.org/10.1557/opl.2011.1384 Zobrazit plný text záznamu Full text from SpringerLink