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The polycrystalline CdSe films were deposited by the close-spaced vacuum sublimation technique at the different substrate temperatures (373–873 K). Surface morphology, grain size and growth mechanism of the films were determined by the scanning electron microscopy. The X-ray diffraction analysis of structural and sub-structural properties of the films was carried out to study their phase composition and growth texture. The main structural parameters of thin films, such as texture, lattice parameter, grain size, scattering domain size and micro-stress level have been determined in the work depending on the condensation film conditions. RBS and FTIR analysis shows that obtained films in general are homogenous and pure. As a result, the growth conditions of CdSe polycrystalline films with good crystal quality were determined. |
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