Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications
| Autor: | Yukari Baba, Atsushi Nagata, Kazuo Chinone, Izumi Nakai, Yoshikazu Homma, Keiichi Tanaka, Akikazu Odawara, Toshimitsu Morooka, Shigenori Aida, Satoshi Nakayama |
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| Rok vydání: | 2009 |
| Předmět: |
Energy Dispersive Spectrometer
Materials science Spectrometer business.industry Scanning electron microscope Resolution (electron density) Detector Acceleration voltage Electronic Optical and Magnetic Materials Optics Dilution refrigerator Electrical and Electronic Engineering Transition edge sensor business |
| Zdroj: | IEICE Transactions on Electronics. :334-340 |
| ISSN: | 1745-1353 0916-8524 |
| DOI: | 10.1587/transele.e92.c.334 |
| Popis: | The Transition Edge Sensor (TES)-Energy Dispersive Spectrometer (EDS) is an X-ray detector with high-energy resolution (12.8eV). The TES can be mounted to a scanning electron microscope (SEM). The TES-EDS is based on a cryogen-free dilution refrigerator. The high-energy resolution enables analysis of the distribution of various elements in samples under low acceleration voltage (typically under 5keV) by using K-lines of light elements and M lines of heavy elements. For example, the energy of the arsenic L line differs from the magnesium K line by 28eV. When used to analyze the spore of the Pteris vittata L plant, the TES-EDS clearly reveals a different distribution of As and Mg in the micro region of the plant. The TES-EDS with SEM yields detailed information about the distribution of multi-elements in a sample. |
| Databáze: | OpenAIRE |
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