Effects of ZnO buffer layer on the luminous properties of thin-film phosphors deposited on ZnO/ITO/glass substrates

Autor: Yong Eui Lee, Youngjin Kim, Sung Mook Chung, Young Ho Jeong
Rok vydání: 2001
Předmět:
Zdroj: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:1095-1098
ISSN: 1520-8559
0734-2101
DOI: 10.1116/1.1342871
Popis: ZnGa2O4:Mn and CaTiO3:Pr thin-film phosphors which emit green and red light, respectively, were deposited on ZnO/ITO/glass and ITO/glass substrates by a rf reactive magnetron-sputtering method. To improve photo- and cathodoluminescent properties of the thin-film phosphors, ZnO buffer layers were deposited between the thin-film phosphor and the ITO-coated glass substrate. A transparent c-axis preferentially oriented ZnO thin-film buffer layer could be obtained on the ITO film, while ITO had an amorphous-like structure. ZnGa2O4:Mn and CaTiO3:Pr thin-film phosphors were used to evaluate the effects of the ZnO buffer layer. The crystal structures of thin-film phosphors deposited on ZnO/ITO/glass substrates were developed better than those on ITO/glass, consequently, the former showed photo- and cathodoluminescent intensity at least twice as high as the latter.
Databáze: OpenAIRE