Aligned Single-Walled Carbon Nanotube Arrays on Patterned SiO2/Si Substrates

Autor:	Kazuhiko Matsumoto, Takaomi Kishimoto, Shin Iwasaki, Yasuhide Ohno, Koichi Inoue, Kenzo Maehashi
Rok vydání:	2010
Předmět:	Materials science Scanning electron microscope business.industry law General Engineering General Physics and Astronomy Optoelectronics Carbon nanotube Reactive-ion etching business Lithography law.invention
Zdroj:	Japanese Journal of Applied Physics. 49:06GK01
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.49.06gk01
Popis:	Horizontally aligned single-walled carbon nanotubes (SWNTs) were fabricated on patterned SiO2/Si substrates with groove-and-terrace or half-cylinder structures by electron-beam lithography and reactive ion etching. Scanning electron microscopy observation reveals that the SWNTs were aligned in the direction parallel to the patterned structures and were preferentially grown along the edges of terraces or along the sidewalls of the half cylinders. The results are consistent with calculations obtained using the Casimir–Polder potential between the SWNTs and the patterned substrates. This method will be promising to control the directions of the SWNTs on SiO2/Si substrates.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::af100bce4be2ee88d8b8535a49aa4361 https://doi.org/10.1143/jjap.49.06gk01 Zobrazit plný text záznamu