Amorphous carbon films in direct current magnetron sputtering from regenerative sooting discharge

Autor:	Sumera Javeed, Sumera Yamin, Sumaira Zeeshan, Muhammad Anwar-ul-Haq, Kashif Yaqub, Sohail Ahmad Janjua, Mazhar Mehmood, Shoaib Ahmad, Afshan Ashraf
Rok vydání:	2011
Předmět:	Materials science Scanning electron microscope Diamond chemistry.chemical_element engineering.material Sputter deposition Condensed Matter Physics Surfaces Coatings and Films Electric arc Carbon film Amorphous carbon chemistry engineering Graphite Composite material Instrumentation Carbon
Zdroj:	Vacuum. 86:193-200
ISSN:	0042-207X
Popis:	We present results of carbon coatings on metal substrates in cylindrical hollow cathode (CHC) direct current magnetron sputtering. This is a new technique for making amorphous carbon films by CHC magnetron sputtering from a regenerative sooting discharge. The carbon films are deposited on Cu and Al substrates in a Ne atmosphere and compared with the films of carbon soot on the same materials produced from a conventional 80A arc discharge between graphite electrodes in a He background gas. Raman spectroscopy reveals the existence of graphite and diamond-like structures from the arc discharge while in CHC magnetron sputtering, graphite-like structures are dominant. X-ray diffraction data of samples from the arc discharge show nano-size precipitates of Al 4 C 3 of rhombohedral and hexagonal form for the aluminium sample and probable formation of diamond and hexagonal carbon in copper whilst in magnetron sputtering we obtain amorphous carbon films. Scanning electron microscope images of the surface show a collection of loose agglomerates of carbon particles in the arc discharge whereas, for magnetron sputtering, structures are regular with smooth edges and fine grains.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::af0ab998922f1ba1232ae63dd6d6e7d5 https://doi.org/10.1016/j.vacuum.2011.06.005 Zobrazit plný text záznamu Full Text from ScienceDirect