Particle Effects on Buried Oxide Leakage in Simox Materials

Autor:	M. K. El-Ghor, J. Hollingsworth, H. H. Hosack, George A. Brown, Keith A. Joyner, Gordon P. Pollack
Rok vydání:	2005
Předmět:	Materials science business.industry Semiconductor materials Electrical engineering Optoelectronics Stress measurement Process design business Buried oxide Voltage Leakage (electronics)
Zdroj:	IEEE International SOI Conference.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aedd14052758f47f6fb61e77463d8267 https://doi.org/10.1109/soi.1992.664813 Zobrazit plný text záznamu