Total Ionizing Dose (TID) Effects in Extremely Scaled Ultra-Thin Channel Nanowire (NW) Gate-All-Around (GAA) InGaAs MOSFETs

Autor: Xin Wan, Peide D. Ye, Sharon Cui, Kai Ni, Daniel M. Fleetwood, Robert A. Reed, Sung-Jae Chang, En Xia Zhang, Mengwei Si, Jin Chen, Shufeng Ren, T. P. Ma, Xiao Sun
Rok vydání: 2015
Předmět:
Zdroj: IEEE Transactions on Nuclear Science. 62:2888-2893
ISSN: 1558-1578
0018-9499
DOI: 10.1109/tns.2015.2497090
Popis: InGaAs nanowire (NW) gate-all-around (GAA) MOSFETs exhibit superior radiation hardness compared to planar devices and FinFETs, benefitting from reduced gate-oxide electric fields. Applied gate bias during irradiation, channel thickness, and presence or absence of a forming gas anneal can strongly affect NW device radiation hardness. Low-frequency noise measurements are carried out to probe near-interfacial oxide-trap (border-trap) densities, and TCAD simulations are performed to assist in understanding the charge trapping in NW channel devices with high-k gate dielectrics. Optimized device structures exhibit high radiation tolerance.
Databáze: OpenAIRE