| Autor: |
S.S. Andreev, Nikolai N. Salashchenko, E. A. Shamov, Dmitrii M. Simanovski, L. A. Shmaenok, Sergey V. Gaponov, Sergei V. Bobashev, Eugene N. Ragozin |
| Rok vydání: |
1998 |
| Předmět: |
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| Zdroj: |
Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.310983 |
| Popis: |
We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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