Characterization of neutral species in an NH3-Ar plasma generated by a capacitively coupled plasma source at various radio frequencies
| Autor: | S. M. Johnson, J. P. Zhao, C. Schlechte, J. Carroll, T. Iwao, P. L. G. Ventzek, J. G. Ekerdt |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Journal of Vacuum Science & Technology A. 41:023002 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/6.0002247 |
| Popis: | Plasma-enhanced atomic layer deposition of SiNx is promising for many device applications, but a lack of growth and material property conformality on three-dimensional device surfaces limits its application. Changing the neutral composition of the nitridation plasma can have an impact on side wall nitridation. In plasma deposition experiments, the role of frequency of the delivered power on neutral species formation is underexplored. We measure the densities of various neutral species generated in a capacitively coupled, 300 mTorr ammonia/argon plasma as a function of driving frequency between 13.56 and 200 MHz using line-of-sight threshold ionization mass spectroscopy. High-density species, which are on the order of 1015 molecules/cm3, such as NH3, H2, H, and N2, as well as lower density species at densities on the order of 1012 molecules/cm3, including N2H2, N2H4, and N2 metastables, were measured and their densities varied with drive frequency. |
| Databáze: | OpenAIRE |
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