A comparative study of acoustic isolation configurations for pMUT array-based applications
| Autor: | Bart Weekers, Véronique Rochus, Bogdan Vysotskyi, Rachid Haouari, Guilherme Brondani Torri, Grim Keulemans |
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| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
Materials science Fabrication business.industry Acoustics 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Finite element method Machining 0103 physical sciences PMUT Microelectronics Isolation (database systems) 0210 nano-technology business 010301 acoustics Order of magnitude |
| Zdroj: | 2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). |
| DOI: | 10.1109/eurosime52062.2021.9410867 |
| Popis: | This paper presents an overview of state-of-the-art acoustic isolation in MEMS and compares several acoustic isolation techniques that can be applied to a pMUT array. To keep the solution for acoustic filtering relatively simple in terms of design and fabrication, several typical solutions are considered: use of mesa-type structures, machining ring-shaped pillars of different materials on the surface and combining the trenches etched on the surface with polymer deposited inside it. A direct comparison of these approaches is made using FEM analysis, and it is demonstrated that the crosstalk in pMUT array can be reduced by the value close to the one order of magnitude. |
| Databáze: | OpenAIRE |
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