Creating efficient nano-gratings buried in silicon through laser nano-lithography
| Autor: | Rana Asgari Sabet, Alperen Saltık, Onur Tokel |
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| Rok vydání: | 2023 |
| Zdroj: | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII. |
| Databáze: | OpenAIRE |
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