Cyclic scheduling of cluster tools with non-identical chamber access times

Autor: Dae-Kyu Kim, null Chihyun Jung, Tae-Eog Lee, null Yu-Ju Jung
Rok vydání: 2011
Zdroj: Proceedings of the 2011 Winter Simulation Conference (WSC).
DOI: 10.1109/wsc.2011.6147920
Databáze: OpenAIRE