| Autor: |
Carlos Ríos, Myungkoo Kang, Kathleen Richardson, Christopher M. Roberts, Qingyang Du, Yifei Zhang, Steven A. Vitale, Hualiang Zhang, Sensong An, Mikhail Y. Shalaginov, Tian Gu, Juejun Hu, Paul Miller, Cosmin-Constantin Popescu, Clayton Fowler |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
Active Photonic Platforms XIII. |
| Popis: |
Optical phase change materials (PCMs) are a unique class of materials which exhibit extraordinarily large optical property change (e.g. refractive index change > 1) when undergoing a solid-state phase transition, and they have witnessed increasing adoption in active integrated photonics and metasurface devices in recent years. Here we report integration of chalcogenide phase change materials in the Lincoln Laboratory 8-inch Si foundry process and the demonstration of electrothermally switched phase-change photonic devices building on a wafer-scale silicon-on-insulator heater platform. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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