Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques
Autor: | Robert B. van Dover, Ichiro Takeuchi, Hideomi Koinuma |
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Rok vydání: | 2002 |
Předmět: | |
Zdroj: | MRS Bulletin. 27:301-308 |
ISSN: | 1938-1425 0883-7694 |
DOI: | 10.1557/mrs2002.97 |
Popis: | Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques. |
Databáze: | OpenAIRE |
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