Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques

Autor: Robert B. van Dover, Ichiro Takeuchi, Hideomi Koinuma
Rok vydání: 2002
Předmět:
Zdroj: MRS Bulletin. 27:301-308
ISSN: 1938-1425
0883-7694
DOI: 10.1557/mrs2002.97
Popis: Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques.
Databáze: OpenAIRE