Comparative study of In0.52Al0.48As/InxGa1−xAs/InP high-electron-mobility transistors with a symmetrically graded and an inversely graded channel

Autor: Wei-Chou Hsu, Yu-Shyan Lin, Dong-Hai Huang, Rong-Tay Hsu, Yue-Huei Wu, Yin-Kai Liao, Juin-Chin Huang
Rok vydání: 2006
Předmět:
Zdroj: Semiconductor Science and Technology. 21:781-785
ISSN: 1361-6641
0268-1242
DOI: 10.1088/0268-1242/21/6/012
Popis: InP-based InAlAs/InxGa1?xAs/InP high-electron-mobility transistors (HEMTs) with a symmetrically graded channel (SGC-HEMT) and an inversely graded channel (IGC-HEMT) were fabricated and studied. The SGC-HEMT exhibits better Hall, dc and RF characteristics than the IGC-HEMT because there are more electrons accumulated in the symmetrically graded channel. However, the IGC-HEMT has better thermal stability than the SGC-HEMT because the former has higher bandgap discontinuity at the channel/buffer heterojunction and less Coulomb scattering from a ?-doped layer. Furthermore, the IGC-HEMT sustains larger output power than the SGC-HEMT attributed to better breakdown characteristics. Therefore, HEMTs with the symmetrically graded and an inversely graded channel are suitable for high-speed and high-power applications, respectively.
Databáze: OpenAIRE