Non-Contact Optical Probe with Nanometer Resolution and Large Measurement Range Based on the Astigmatism Method
Autor: | Jian Xu, Qiangxian Huang, Zhihao Zhao, Xinlei Chen, Liansheng Zhang, Rongjun Cheng, Qiaosheng Pan, Ruijun Li |
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Rok vydání: | 2023 |
Databáze: | OpenAIRE |
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