Design and Simulation of Capacitive Z-axis MEMS Accelerometers using SU-8, PolySi, Si3N4, and SiC-based structural materials
| Autor: | Mandeep Jangra, Dhairya Singh Arya, Robin Khosla, Satinder Kumar Sharma |
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| Rok vydání: | 2020 |
| Zdroj: | 2020 5th IEEE International Conference on Emerging Electronics (ICEE). |
| Databáze: | OpenAIRE |
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