Stress Effects of Interconnecting Metals on Back-End-of-Line Compatible Hf0.5Zr0.5O2 Ferroelectric Capacitors

Autor:	Pengfei Jiang, Yang Yang, Wei Wei, Tiancheng Gong, Yuan Wang, Yuting Chen, Yaxin Ding, Shuxian Lv, Boping Wang, Meiwen Chen, Yan Wang, Qing Luo
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Electron Device Letters. 44:602-605
ISSN:	1558-0563 0741-3106
DOI:	10.1109/led.2023.3248103
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ae3cc89c3911283c63a287ba2d34964c https://doi.org/10.1109/led.2023.3248103 Zobrazit plný text záznamu