Planning wafer allocation for CMOS process development. A nonparametric approach
| Autor: | Sharad Saxena, P.K. Mozumder, Karthik Vasanth, Joseph C. Davis, R. Burch, S. Rao |
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| Rok vydání: | 1998 |
| Předmět: |
Structure (mathematical logic)
Mathematical optimization Engineering business.industry Nonparametric statistics Sampling (statistics) ComputerApplications_COMPUTERSINOTHERSYSTEMS Variance (accounting) Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials Power (physics) CMOS Sample size determination Statistics Electrical and Electronic Engineering business Performance metric |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 11:583-590 |
| ISSN: | 0894-6507 |
| Popis: | In this paper, we present techniques that can be used to answer the following two questions: (1) how many wafers need to be allocated per treatment to detect a given difference in a device performance metric and (2) how can one determine if a given treatment significantly improved a performance metric? The approach presented here does not make any assumptions regarding the shape of the distribution or the spatial dependency structure for the within-wafer performance measurements and remains applicable for a variety of performance metrics, such as mean, variance, and median. The analysis method can be used in decisions regarding the appropriateness of allocating half or quarter wafer splits to a treatment. Furthermore, the approach allows us to evaluate and compare within-wafer sampling strategies for comparing performance metrics from competing flows. |
| Databáze: | OpenAIRE |
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