Development of Evaluation Method for Geometrical Characterization of Polishing Pad Surface Texture Based on Contact Image Analysis Using Image Rotation Prism

Autor:	Kazutaka Shibuya, Kenji Okabe, Ken-ichi Ishikawa, Michio Uneda, Norihiko Moriya
Rok vydání:	2011
Předmět:	Image rotation Materials science Optics business.industry Mechanical Engineering Evaluation methods Polishing Development (differential geometry) Surface finish Prism business Characterization (materials science) Image (mathematics)
Zdroj:	Journal of the Japan Society for Precision Engineering. 77:883-888
ISSN:	1882-675X 0912-0289
DOI:	10.2493/jjspe.77.883
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ae128e6e8285086774fdee32e3525300 https://doi.org/10.2493/jjspe.77.883 Zobrazit plný text záznamu