Texture change of TiN films due to anisotropic incorporation of oxygen

Autor:	M.F. Hasaneen, Péter B. Barna, István Dódony, Péter Pekker, S. Gurbán, Miklós Menyhárd, D. Biro, L. Székely
Rok vydání:	2014
Předmět:	Materials science chemistry.chemical_element Crystal structure Condensed Matter Physics Oxygen Surfaces Coatings and Films Crystal Crystallography chemistry Transmission electron microscopy Surface layer Texture (crystalline) Anisotropy Tin Instrumentation
Zdroj:	Vacuum. 103:78-86
ISSN:	0042-207X
Popis:	Results of comprehensive structural and microchemical analyses revealed the mechanisms responsible for changing the to competitive growth texture of TiN films when the level of oxygen doping was 20 at.%. It has been shown that the growth competition is related to the different way of segregation-incorporation of the oxygen species on the {001} and {111} crystal faces. Oxygen is preferentially segregated on the {111} crystal face and is growing in the form of a 2D TiO2 surface layer on the growth surface, limiting the growth of oriented crystals. On the {001} faces, however, the major part of condensing oxygen species is dissolved into the crystal lattice and only a part forms TiO2 aggregates. These aggregates have a 3D morphology which do not hinder the growth of oriented crystals. Consequently, the oriented crystals win the growth competition leading to a film structure constituted of V-shaped columns.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ae0b22076843e0f1a2d51660b104c805 https://doi.org/10.1016/j.vacuum.2013.12.013 Zobrazit plný text záznamu Full Text from ScienceDirect