Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes
| Autor: | N. N. Salashchenko, V. A. Bespalov, E.O. Popov, N. A. Djuzhev, Sergey V. Filippov, Nikolay I. Chkhalo, I. D. Evsikov, Nikolay A. Filippov, P. Yu. Glagolev, A.G. Kolosko, Gleb D. Demin, M. A. Makhiboroda |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Physics and Astronomy (miscellaneous) Silicon business.industry X-ray chemistry.chemical_element 01 natural sciences Cathode 010305 fluids & plasmas law.invention Anode Field electron emission Semiconductor chemistry law 0103 physical sciences Electrode Optoelectronics business Voltage |
| Zdroj: | Technical Physics. 64:1742-1748 |
| ISSN: | 1090-6525 1063-7842 |
| Popis: | The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation. |
| Databáze: | OpenAIRE |
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