| Autor: |
D. Zook, Henry Guckel, J. Klein, T. Earles, Thomas R. Ohnstein |
| Rok vydání: |
2005 |
| Předmět: |
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| Zdroj: |
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. |
| DOI: |
10.1109/sensor.1995.717184 |
| Popis: |
Magnetically driven linear micro actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGA-like processing techniques. These devices are driven at resonant frequencies of around 350 Hz an exhibit quality factors of about 300 in air. Exploiting wire wound electromagnets, 300 /spl mu/m resonant displacements have been demonstrated with drive signal currents of about 1 mA and power dissipation of less than 200 /spl mu/W. In addition, the self inductance of the coils in these actuators varies linearly with plunger displacement. The inductance changes of about 1 /spl mu/H/ /spl mu/m may be used for inductive position sensing and as a measure of output force. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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