Diode-Pumped Q-switched 355-nm Lasers – High-precision tools for micromachining

Autor:	Werner H. Wiechmann
Rok vydání:	2005
Předmět:	Surface micromachining Materials science law business.industry Key (cryptography) Optoelectronics Microelectronics Nanotechnology Laser business Diode law.invention
Zdroj:	Laser Technik Journal. 2:35-37
ISSN:	1863-9119 1613-7728
DOI:	10.1002/latj.200790051
Popis:	Advances in multi-watt, diodepumped Q-switched 355-nm lasers make them reliable tools that enable several micromachining applications in the microelectronics industry. The following article discusses key applications and the attributes demanded from the laser.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ad97060b844e6a1ad697851c17065ad5 https://doi.org/10.1002/latj.200790051 Zobrazit plný text záznamu Plný text