Transparent conductive Nb-doped TiO2 films deposited by direct-current magnetron sputtering using a TiO2− target
| Autor: | Hideo Akizuki, Toshihisa Kamiyama, Yasushi Sato, Yuzo Shigesato |
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| Rok vydání: | 2008 |
| Předmět: |
Anatase
Materials science Doping Metals and Alloys Analytical chemistry Mineralogy Surfaces and Interfaces Sputter deposition Surfaces Coatings and Films Electronic Optical and Magnetic Materials Electrical resistivity and conductivity Physical vapor deposition Materials Chemistry Crystallite Thin film Transparent conducting film |
| Zdroj: | Thin Solid Films. 516:5758-5762 |
| ISSN: | 0040-6090 |
| Popis: | Nb-doped anatase TiO 2 films were deposited on unheated glass by dc magnetron sputtering using a slightly reduced TiO 2 − x target (2 − x = 1.986; conductivity, 3.7 S cm − 1 ; density, 4.21 g/cm 3 ) with Nb 2 O 5 pellets on it. After post-annealing in a vacuum (6 × 10 − 4 Pa) at 400 °C for 1 h, these films were crystallized into a polycrystalline anatase TiO 2 structure. The resistivity of the films decreased to 1.3 × 10 − 3 Ω cm with increasing Nb concentration up to 6.4 at.%, where the carrier density was 1.3 × 10 21 cm − 3 and the doping efficiency was estimated to be 65%. Such films exhibited high transparency of over 60–70% in the visible light region. |
| Databáze: | OpenAIRE |
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