Development of an active high-density transverse intrafascicular micro-electrode probe
| Autor: | Kevin J. Otto, Nima Maghari, Rik Verplancke, Rizwan Bashirullah, Erkuden Goikoetxea, Dieter Cuypers, Erin Patrick, Maarten Cauwe, Bjorn Vandecasteele, Dries Braeken, Aritra Kundu, Marco Ballini, John O'Callaghan, Lothar Mader, David Schaubroeck, Maaike Op de Beeck, Celine Vanhaverbeke |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
business.industry Mechanical Engineering 02 engineering and technology Integrated circuit 021001 nanoscience & nanotechnology Chip Electronic Optical and Magnetic Materials law.invention Atomic layer deposition Mechanics of Materials law Electrode Electrode array Miniaturization Optoelectronics Electronics Electrical and Electronic Engineering Thin film 0210 nano-technology business |
| Zdroj: | Journal of Micromechanics and Microengineering. 30:015010 |
| ISSN: | 1361-6439 0960-1317 |
| Popis: | Objective. In this work, the development of an active high-density transverse intrafascicular micro-electrode (hd-TIME) probe to interface with the peripheral nervous system is presented. Approach. The TIME approach is combined with an active probe chip, resulting in improved selectivity and excellent signal-to-noise ratio. The integrated multiplexing capabilities reduce the number of external electrical connections and facilitate the positioning of the probe during implantation, as the most interesting electrodes of the electrode array can be selected after implantation. The probe chip is packaged using thin-film manufacturing techniques to allow for a minimally invasive electronic package. Special attention is paid to the miniaturization, the mechanical flexibility and the hermetic encapsulation of the device. Main results. A customized probe chip was designed and packaged using a flexible, implantable thin electronic package (FITEP) process platform. The platform is specifically developed for making slim, ultra-compliant, implantable complementary metal-oxide-semiconductor based electronic devices. Multilayer stacks of polyimide films and HfO2/Al2O3/HfO2 layers deposited via atomic layer deposition act as bidirectional diffusion barriers and are key to the hermetic encapsulation. Their efficacy was demonstrated both by water vapor transmission rate tests and accelerated immersion tests in phosphate buffered saline at 60 °C. Using the hd-TIME probe, an innovative implantation method is developed to prevent the fascicles from moving away when the epineurium is pierced. In addition, by transversally implanting the hd-TIME probe in the proximal sciatic nerve of a rat, selective activation within the nerve was demonstrated. Significance. The FITEP process platform can be applied to a broader range of integrated circuits and can be considered as an enabler for other biomedical applications. |
| Databáze: | OpenAIRE |
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