Effect of boron/phosphorus ratio in lithium boron phosphorus oxynitride thin film electrolytes for all-solid-state thin film batteries
Autor: | Sunho Choi, Dongwook Shin, Chanhwi Park, Sangsoo Lee |
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Rok vydání: | 2019 |
Předmět: |
010302 applied physics
Lithium borate Materials science Metals and Alloys Analytical chemistry Infrared spectroscopy chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry X-ray photoelectron spectroscopy 0103 physical sciences Materials Chemistry Ionic conductivity Lithium Thin film 0210 nano-technology Boron |
Zdroj: | Thin Solid Films. 685:434-439 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2019.06.055 |
Popis: | For application to all-solid-state thin film batteries, lithium boron phosphorus oxynitride (LiBPON) thin films were fabricated by RF magnetron sputtering technique of lithium borate (Li 3 BO 3 ) and lithium phosphate (Li 3 PO 4 ) target under N 2 atmosphere. To investigate the mixed former effect upon the LiBPON thin films, we prepared various films with controlled B and P contents. The LiBPON thin film formulation with nearly equal B and P contents showed the highest room-temperature lithium ionic conductivity of 3.52 × 10 −6 S cm −1 and the lowest activation energy of 48.24 kJ mol −1 owing to the mixed former effect, the increased lithium content and nitridation. Infrared spectra of the glass thin films achieved two dominant peaks corresponding to BO 3 3− and PO 4 3− unit. N1s spectra were analyzed by X-ray photoelectron spectroscopy that the increased ionic conductivities observed were related to the formation of triply coordinated nitrogen. |
Databáze: | OpenAIRE |
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