MOCVD of high quality YBa2Cu3O7−δ thin films using a fluorinated barium precursor
| Autor: | Michael L. Hitchman, G.W. Andrews, B. Schulte, A. Brown, H. Jürgensen, G. Lengeling, T. Freltoft, P. Vase, Sarkis H. Shamlian, B.C. Richards, D.L. Pinch, Y.Q. Shen, S.L. Cook, C.I.M.A. Spee, J.L. Linden |
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| Rok vydání: | 1995 |
| Předmět: |
Materials science
Scanning electron microscope Analytical chemistry Oxide Energy Engineering and Power Technology chemistry.chemical_element Barium Condensed Matter Physics Epitaxy Magnetic susceptibility Electronic Optical and Magnetic Materials Secondary ion mass spectrometry chemistry.chemical_compound chemistry Metalorganic vapour phase epitaxy Electrical and Electronic Engineering Thin film |
| Zdroj: | Physica C: Superconductivity. 252:229-236 |
| ISSN: | 0921-4534 |
| Popis: | MOCVD of superconducting YBa 2 Cu 3 O 7δ thin films using the novel fluorinated barium β-diketonate complex [Ba(TDFND) 2 ·tetraglyme] 1 in combination with [Y(TMHD) 3 ] 2 and [Cu(TMHD) 2 ] is reported. The Ba complex has a low melting point (72°C), is thermally stable to 200°C and allows reproducible and reliable film deposition even when maintained at 145°C for several weeks. Conversion of the fluoride to the oxide is achieved by in situ hydrolysis. Films deposited on SrTiO 3 (100) were characterised by scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray diffraction, rocking curve, ac susceptibility and secondary ion mass spectrometry. Homogeneous layers of YBa 2 Cu 3 O 7−δ , ≈ 0.25 μm thick, were grown at ≈ 0.13 μm h −1 . The films are epitaxial with good c axis orientation. Critical temperatures T c are typically 91 K and critical current densities c (at 77 K) of ≈ 5 MA cm −2 are reported. SIMS results showing levels of residual fluorine do not exceed 250 ppm. |
| Databáze: | OpenAIRE |
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