Growth of III-N/graphene heterostructures in single vapor phase epitaxial process

Autor: I. A. Eliseyev, Alexander N. Smirnov, W. V. Lundin, V. Yu. Davydov, L.K. Markov, M. A. Yagovkina, A. F. Tsatsul’nikov, E.Yu. Lundina, E. E. Zavarin, D. A. Zakheim, Pavel N. Brunkov, A. V. Sakharov
Rok vydání: 2018
Předmět:
Zdroj: Journal of Crystal Growth. 504:1-6
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2018.09.017
Popis: We investigated the growth of III-N/graphene heterostructures as a single process in a MOVPE reactor. Raman spectra revealed that graphene can be successfully deposited on sapphire substrate by propane pyrolysis if temperature exceeds 1060 °C and hydrogen is used as a carrier gas. GaN epitaxial layers and heterostructures on such graphene using both high-temperature AlN buffer layer and low-temperature GaN nucleation layer was demonstrated. Analysis of surface morphology and X-Ray diffraction curves indicate that GaN quality depends on graphene thickness. Use of copper electroplated Ni-based contact layer combined with thermal shock allows exfoliation of large-area III-N LED structures from sapphire.
Databáze: OpenAIRE