Sub-60mV/dec Subthreshold Swing on Reliability of Ferroelectric HfZrOx Negative-Capacitacne FETs with DC Sweep and AC Stress Cycles

Autor:	K.-T. Chen, C.-Y. Liao, R.-C. Hong, S.-S. Gu, Y.-C. Chou, Z.-Y. Wang, S.-Y. Chen, G.-Y. Siang, H.-Y. Chen, C. Lo, P.-G. Chen, Y.-J. Lee, M.-H. Liao, K.-S. Li, S.T. Chang, M.-H. Lee
Rok vydání:	2018
Předmět:	Stress (mechanics) Materials science Reliability (semiconductor) business.industry Subthreshold swing Optoelectronics business Ferroelectricity
Zdroj:	Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ad39143f9bbb12d28f3c89f17dd4184a https://doi.org/10.7567/ssdm.2018.c-4-01 Zobrazit plný text záznamu