| Autor: |
Alexander Svetlitza, Amikam Nemirovsky, Igor Brouk, Alex Zviagintsev, Sharon Bar-Lev, Yael Nemirovsky, Ilan Bloom, Tanya Blank, Sara Stolyarova |
| Rok vydání: |
2017 |
| Předmět: |
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| Zdroj: |
2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems (COMCAS). |
| DOI: |
10.1109/comcas.2017.8244810 |
| Popis: |
This paper presents the performance of CMOS-SOI TMOS thermal sensor processed in a well-established 1μm technology, operating in air. The TMOS is a micro-machined CMOS transistor, operating at subthreshold. The thermally isolated floating MOS transistor senses temperature changes induced by either a physical or a chemical phenomenon. The change in temperature modifies the threshold voltage and accordingly the I-V characteristics of the micro-machined transistor. Operation in air, without vacuum packaging, enables low-cost products for a wide range of low-cost commercial mobile applications such as IoT, wearables, smart homes and smartphones. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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