Temperature-Measurement System Using Optical Fiber-Type Low-Coherence Interferometry for MultiLayered Substrate
| Autor: | Nobuo Ishii, Tatsuo Shiina, Yasuyuki Okamura, Keigo Takeda, Masafumi Ito, Yutaka Tomekawa |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Optical fiber
Materials science Physics and Astronomy (miscellaneous) Silicon business.industry Hybrid silicon laser General Engineering General Physics and Astronomy Silicon on insulator chemistry.chemical_element Temperature measurement law.invention Interferometry Optics chemistry law Optoelectronics business Quartz Coherence (physics) |
| Zdroj: | Japanese Journal of Applied Physics. 43:7737-7741 |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.1143/jjap.43.7737 |
| Popis: | We have developed a novel temperature measurement system for controlling the temperature of each layer of multilayered substrates, such as a silicon on insulator (SOI), and have evaluated the system using a three-layered substrate, whose top and bottom layers are silicon, each 360 µm in thickness, and whose interlayer is quartz, 1 mm in thickness. From these results, we have confirmed that the system has a resolution of less than 1°C in the top and bottom layers of the substrate. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|