Manufacture of single electron transistors using AFM manipulation on multiwalled carbon nanotubes

Autor: Reeta Tarkiainen, Leif Roschier, Pertti Hakonen, M. Paalanen, M. Ahlskog
Rok vydání: 2002
Předmět:
Zdroj: Microelectronic Engineering. :687-691
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00445-8
Popis: We have investigated the potential of using multiwalled carbon nanotubes for constructing low-noise single-electron transistors (SETs). In our best devices, we use free-standing structures where the carbon nanotube is positioned on top of two 20-nm thick gold leads using AFM manipulation. A rapid, 10–30-s, heat treatment at 1000 K after manipulation results in a contact resistance of 10–20 kΩ. The 1/ f -noise is minimized in these free-standing constructions owing to the missing contact area with the SiO 2 substrate insulator that contains the trapping centers of charge. The measured equivalent background charge noise is in the range 2·10 −5 –6·10 −6 e/Hz 1/2 at frequencies of 10–45 Hz. These results are equal to those obtained on the best metallic devices available at present.
Databáze: OpenAIRE