Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures

Autor:	Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop
Rok vydání:	2001
Předmět:	Reduction (complexity) Materials science Stiction General Materials Science Nanotechnology Self-assembled monolayer Wetting Condensed Matter Physics Atomic and Molecular Physics and Optics Silicon based
Zdroj:	Solid State Phenomena. :23-26
ISSN:	1662-9779
DOI:	10.4028/www.scientific.net/ssp.76-77.23
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::acf309e10d27d6482bbe3ff68b36fd7e https://doi.org/10.4028/www.scientific.net/ssp.76-77.23 Zobrazit plný text záznamu