Precision long-focus field-emission low-energy multibeam klystrode-type electron gun

Autor:	N.N. Chubun, I.L. Golenitsky, I.M. Sokolova, A.V. Galdetsky
Rok vydání:	2002
Předmět:	Physics business.industry Liquid helium Electron Electrostatics Cathode law.invention Field electron emission Optics law Electron optics Cold cathode business Electron gun
Zdroj:	9th International Vacuum Microelectronics Conference.
DOI:	10.1109/ivmc.1996.601889
Popis:	High precision long-focus field-emission low-energy electron probe was designed on base of the thin-film cold cathode. Some parts of electrostatic focusing system and 10 GHz pulse modulator are integrated with the cathode. The electron probe operates at liquid helium temperature. The smallest size of the electron spot after passage through 200 mm long drift space does not exceeded 3 /spl mu/.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::acf177ea9adcaa07ccf39a84db8bf0f0 https://doi.org/10.1109/ivmc.1996.601889 Zobrazit plný text záznamu